Rapid Thermal Processing: Science and Technology

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	Rapid Thermal Processing: Science and Technology
	by Richard B. Fair Sales Rank: 690914	$134.00 At Amazon on 5-15-2008.

*Features* Cover Type: Hard Cover with 430 pages Published by: Academic Press April 15, 1993 Written in: English ISBN 10 Number: 0122476905 ISBN 13 Number: 978-0122476907 Book Dimensions: 9.3 x 6.3 x 1 inches Weighs: 1.8 pounds *Book Description* This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering. Back To Top
Rapid Thermal Processing: Science and Technology ~~List Price: $134.00~~ Available from Amazon Price: $134.00 Updated on 5-15-2008.

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